| 发明名称 | Optical filter, optical filter device, analyzer, and method for manufacturing optical filter | ||
| 摘要 | An optical filter includes: a first substrate and a second substrate that are disposed to face each other; a first mirror and a first electrode that are disposed on the second substrate side of the first substrate; and a second mirror and a second electrode that are disposed on the first substrate side of the second substrate, wherein the first mirror and the second mirror are connected via a wire. | ||
| 申请公布号 | US9069160(B2) | 申请公布日期 | 2015.06.30 |
| 申请号 | US201012787633 | 申请日期 | 2010.05.26 |
| 申请人 | Seiko Epson Corporation | 发明人 | Hirokubo Nozomu;Funasaka Tsukasa |
| 分类号 | G02B26/00;G01J3/26;G01J3/42;G01J3/51 | 主分类号 | G02B26/00 |
| 代理机构 | Harness, Dickey & Pierce, P.L.C. | 代理人 | Harness, Dickey & Pierce, P.L.C. |
| 主权项 | 1. An optical filter comprising: a first substrate and a second substrate that are disposed to face each other; a first mirror and a first electrode that are disposed on a second substrate side of the first substrate; and a second mirror and a second electrode that are disposed on a first substrate side of the second substrate, wherein the first mirror and the second mirror are electrically connected via a wire to have a same electric potential; the wire includes a first wire that is extended from the first mirror to a bonding region of the first substrate, and a second wire that is extended from the second mirror to a bonding region of the second substrate, wherein the first wire and the second wire are connected to each other in the bonding regions; and the first mirror and the second mirror are separated by an air gap. | ||
| 地址 | JP | ||