| 摘要 |
<p>A method of controlling an operation of a semiconductor testing facility comprises the steps of: confirming whether a reference file which includes reference values and tolerance values of process parameters in relation with a semiconductor test process is stored in a semiconductor testing facility; comparing process parameters which are already stored in the semiconductor testing facility with the tolerance values; and suspending the operation of the semiconductor testing facility if the process parameters which are already stored exceed the tolerance values.</p> |
