| 摘要 |
The present invention relates to a method of manufacturing a device using a release process and a method of manufacturing a variable light shielding device and a display device using the same. The present invention includes: a process of forming a substrate made of polyimide on a support plate; a process of forming a device layer on the substrate; a process of emitting a laser to the support plate; and a process of separating the support plate from the substrate. The polyimide includes carbonyl and anhydride. According to the present invention, adhesion between the support plate and the substrate is superior without separate sacrificial layer deposition and adhesion enhancer. Also, combination between the substrate and the support plate can be easily broken by laser irradiation so that a release process is easily carried out. |
