发明名称 SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
摘要 <p>Provided in the present invention is a substrate treating apparatus. The substrate treating apparatus comprises a housing; a support unit supporting a substrate, and rotating the substrate; and a washing unit including a roll brush washing the substrate by having the circumferential surface contacting with the substrate, and rotated around a center axis, wherein the roll brush is formed to have different linear speed in the longitudinal direction.</p>
申请公布号 KR20150072200(A) 申请公布日期 2015.06.29
申请号 KR20130159591 申请日期 2013.12.19
申请人 SEMES CO., LTD. 发明人 PARK, JONG YEOL
分类号 H01L21/304;H01L21/302 主分类号 H01L21/304
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