ELECTRONIC CIRCUIT FOR MEASURING ROTATIONAL SPEED IN A MEMS GYROSCOPE AND METHOD FOR ACTUATING THE CIRCUIT

摘要

An electronic circuit (1) measures an angular speed at a gyroscope comprising a mass (m) connected to a spring (k) and a damping element (d); an activating capacitor (C_act) for activating the mass (m); and a detecting capacitor (C_det) for detecting the movement of the mass (m). The electronic circuit (1) comprises: a measurement resistance (4) which is connected to the moving mass (m) and has a change in the same resistance value as a vibration frequency of the mass (m). The resistance (4) is polarized for supplying a measurement signal (S_m), and the measurement signal (S_m) comprises: a carrier signal which is in the phase with a vibration of the mass (m); and an angular speed signal whose phase is shifted as much as π/2 to the carrier signal. The phase of the measurement signal (S_m) is shifted as much as π/2 to the carrier signal, and is supplied to an integral unit (5) which is clocked by a clocking signal (S_CLK) originating in the driving circuit (3). The angular speed signal is demodulated at an output of the integral unit (5).