发明名称 |
IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME |
摘要 |
<p>The present invention relates to an image sensor preventing degradation of properties caused by increase in ratio between signal and noise, and to a fabricating method thereof. The image sensor comprises a transfer gate formed on a front surface of a substrate; a photoelectric conversion area formed on the substrate on one side of the transfer gate; and a floating diffusion area including a trench formed on the other side substrate of the transfer gate, a barrier film covering the bottom of at least the trench, and a conductive film gap-filled on the trench.</p> |
申请公布号 |
KR20150071768(A) |
申请公布日期 |
2015.06.29 |
申请号 |
KR20130158162 |
申请日期 |
2013.12.18 |
申请人 |
SK HYNIX INC. |
发明人 |
KIM, DO HWAN;YANG, YUN HEE;KIM, DAE WOO;KIM, JONG CHAE;LIM, SU HWAN |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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