发明名称 WIRE-BONDING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 Provided is a wire-bonding apparatus (10) including: a capillary (28) through which a wire (30) inserted; and a controller (80). The controller (80) is configured to execute operations including: a disconnection operation, after the second bonding operation, of moving the capillary through which the wire is inserted within a horizontal plane vertical to an axial direction of the capillary while the wire is held in the clamped state, and thereby disconnecting the wire from the second bonding point; a preliminary bonding operation of feeding the wire from the second bonding point to a predetermined preliminary bonding point, and performing preliminary bonding at the preliminary bonding point; and a shaping operation, after the preliminary bonding operation, of shaping the wire projecting from a tip of the capillary into a predetermined flexed shape.
申请公布号 SG11201503849Y(A) 申请公布日期 2015.06.29
申请号 SG11201503849Y 申请日期 2013.09.18
申请人 SHINKAWA LTD. 发明人 SEKINE, NAOKI;NAKAZAWA, MOTOKI;NAGASHIMA, YASUO
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址