| 摘要 |
FIELD: measurement equipment.SUBSTANCE: invention relates to the field of measuring equipment, namely to optical devices for measurement of small angular movements of object. The diffraction method of measurement of angular movements consists in that the object with the reflector installed on it is illuminated with the laser radiation and the radiation is directed through a slot, forming behind it Fraunhofer's diffraction pattern. By separating from this pattern by the second slot or by the diffraction lattice the fragment containing phase inversion lines of various orders the interferential bands are obtained using which the angular position of the object are determined. The device for monitoring of angular movements implementing the offered method contains optically connected and series placed a laser source, a beam-forming arrangement, an auxiliary mirror, a beam splitter, a reflector mounted on an object of measurement, two slots turned to the angle ? with reference to each other and a photodetector. Meanwhile the second slot separated the fragment of the diffraction pattern with phase inversion lines of different orders.EFFECT: improvement of accuracy and range of angular measurements, and also simplification of design and adjustment of the device implementing them.3 cl, 2 dwg |
