| 摘要 |
<p>An evaporation source transfer apparatus and an organic material deposition apparatus are disclosed. According to an embodiment of the present invention, the evaporation source transfer apparatus comprises: a rail part which is arranged in the transfer direction of an evaporation source and includes a flat rail having a flat upper surface and a dispersed rail joined to the flat rail in a longitudinal direction, wherein a dispersed part is formed on the dispersed rail in a longitudinal direction; a transfer block including a block body joined to the evaporation source, a circular roller joined to one end of the block body to be rotated and supported in the upper surface of the flat rail, and a groove roller which is joined to the other end of the block body to be rotated and has a groove as a valley formed along the outer circumference to allow the dispersed part to be inserted; and an LM motor having a magnet row wherein N and S poles are alternately arranged in the transfer direction of the evaporation source and a coil part arranged to face the magnet row.</p> |
