发明名称 FABRICATION METHOD OF CIGS THIN FILMS AND ITS APPLICATION TO THIN FILM SOLAR CELLS
摘要 The present invention relates to a method for manufacturing a CIGS thin-film capable of compensating for grain boundary defect problems and increasing the conversion efficiency of a thin-film solar cell accordingly, a thin-film solar cell manufacturing method using the same, and the thin-film solar cell thereof. According to the present invention, the CIGS thin-film manufacturing method includes: a substrate mounting step of mounting a substrate on a sputtering apparatus; and a CIGS thin-film deposition step of sputtering a single CIGS target through a single sputtering process to deposit the CIGS thin-film on the substrate.
申请公布号 KR20150071458(A) 申请公布日期 2015.06.26
申请号 KR20130158514 申请日期 2013.12.18
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 KIM, TAE WON;PARK, JAE CHEOL;LEE, YOUNG JUN;LEE, JEON RYANG;LEE, SEUNG HYOUN
分类号 H01L31/0445;H01L31/18 主分类号 H01L31/0445
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