发明名称 |
FABRICATION METHOD OF CIGS THIN FILMS AND ITS APPLICATION TO THIN FILM SOLAR CELLS |
摘要 |
The present invention relates to a method for manufacturing a CIGS thin-film capable of compensating for grain boundary defect problems and increasing the conversion efficiency of a thin-film solar cell accordingly, a thin-film solar cell manufacturing method using the same, and the thin-film solar cell thereof. According to the present invention, the CIGS thin-film manufacturing method includes: a substrate mounting step of mounting a substrate on a sputtering apparatus; and a CIGS thin-film deposition step of sputtering a single CIGS target through a single sputtering process to deposit the CIGS thin-film on the substrate. |
申请公布号 |
KR20150071458(A) |
申请公布日期 |
2015.06.26 |
申请号 |
KR20130158514 |
申请日期 |
2013.12.18 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
KIM, TAE WON;PARK, JAE CHEOL;LEE, YOUNG JUN;LEE, JEON RYANG;LEE, SEUNG HYOUN |
分类号 |
H01L31/0445;H01L31/18 |
主分类号 |
H01L31/0445 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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