DEPOSITION APPARATUS FOR FLAT PANEL DISPLAY DEVICE
摘要
<p>Disclosed is a deposition apparatus for a flat panel display device to deposit a thin film on a substrate for a flat panel display device and to improve deposition quality. The deposition apparatus for a flat panel display device comprises a nozzle assembly which rotates with a wire around a rotary shaft arranged on one side of the substrate to successively provide different kinds of deposition gases for the substrate in accordance with the order of an atomic layer deposition process.</p>
