| 摘要 |
<p>The present invention relates to an evaporation source and a deposition apparatus including the same. According to the present invention, the evaporation source to provide evaporation materials for forming an organic thin film on a substrate comprises: a crucible to accept the evaporation materials; a nozzle part joined to the top of the crucible; and a heater part for covering the nozzle part to heat the nozzle part, wherein the heater part may comprise first and second heater blocks joined together to cover the nozzle part. The first and second heater blocks comprise: a housing; and a heating wire supported in the inner side of the housing, wherein a cooling passage may be formed on the outer wall of the housing.</p> |
