| 摘要 |
PROBLEM TO BE SOLVED: To develop a deposition device with high productivity, by which plurality of organic materials are deposited together, in a state that compositions are accurately controlled. ! SOLUTION: In the deposition device of the invention having a vacuum chamber and plurality of deposition devices for evaporating the organic material, the evaporated organic material is deposited to make a film on a deposition face which is one main face of a substrate provided in the vacuum chamber. In the vacuum chamber, at least two substrates can be provided with their deposition faces facing each other. Between deposition faces of two substrates, which faces each other, an organic material discharge section 1 and an organic material discharge section 2 are provided as discharge sections capable of discharging evaporated organic material supplied from the deposition device. Plurality of kinds of organic materials are deposited to make a film at the same time on both deposition faces, by both of the organic m |
