ULTRASONIC SENSOR ELEMENT, MANUFACTURING METHOD THEREFOR, AND ULTRASONIC SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a novel ultrasonic sensor element with high resolution. ! SOLUTION: An ultrasonic sensor element includes: a substrate 12 having an opening 11 formed therethrough; a vibrating plate 13 provided on the substrate 12 to cover the opening 11; and a piezoelectric element 17 comprising a first electrode 14, piezoelectric layer 15, and second electrode 16 laminated on the vibrating plate 13 on a side opposite the opening 11. An area around the piezoelectric element 17 is surrounded by a sealing plate 22 having recesses 23 formed on a surface facing the piezoelectric element 17. ! COPYRIGHT: (C)2015,JPO&INPIT