| 摘要 |
A gas comprising H2O molecules is introduced into a cluster-generating unit through a nozzle of a gas cluster ion beam device. The introduced water vapor is aggregated by cooling by adiabatic expansion, and beam-shaped H2O clusters are formed. The H2O clusters, having been introduced into an irradiation unit, are ionized by an ionization device. The H2O clusters, having been ionized and positively charged, are drawn out by a plurality of electrodes to which a lower voltage than that of the ionization device is applied; after acceleration, focusing of the beams, and separation of cluster sizes by the electrodes, a substrate on which a sheet of graphene has been formed is irradiated to etch the graphene into nanoribbons having edges of an armchair shape. |
