METHOD FOR PREPARING SAMPLES FOR IMAGING

摘要

A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. Material is deposited onto the sample using charged particle beam deposition just before or during the final milling, which results in an artifact-free surface. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples.

主权项

1. A method of preparing a sample for analysis, the method comprising:
directing an ion beam toward a work piece to remove material and expose a surface, the exposed surface having irregularities; depositing material on the exposed surface, the deposited material smoothing the irregularities; directing an ion beam toward the work piece to remove the deposited materials and some material from the exposed surface to produce a smooth cross sectional face.