METHOD FOR EVALUATING OPTICAL IMAGE OF PATTERN, RECORDING MEDIUM, AND INFORMATION PROCESSING APPARATUS

摘要

A method being performed by a processor includes, acquiring data of patterns of a plurality of cells that include an identified pattern for which an evaluation value of an optical image falls outside a first allowable range among patterns in which each a pattern being single cell alone, creating the pattern of a mask by arranging the patterns of the plurality of cells that include the identified pattern, and evaluating an optical image of the identified pattern in the created pattern of the mask.

主权项

1. A method performed by a processor comprising:
acquiring data of patterns of a plurality of cells that include an identified pattern for which an evaluation value of an optical image falls outside a first allowable range among patterns in which each pattern being a single cell alone; creating the pattern of a mask by arranging the patterns of the plurality of cells that include the identified pattern; and evaluating an optical image of the identified pattern in the created pattern of the mask.