BEAM TRANSPORT SYSTEM FOR EXTREME ULTRAVIOLET LIGHT SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a beam transport system for amplified light of a high power laser system.SOLUTION: An extreme ultraviolet light system includes: a drive laser system for producing an amplified light beam; a target material delivery system configured to produce target material at a target location; an extreme ultraviolet light vacuum chamber for defining an interior vacuum space that houses an extreme ultraviolet light collector and the target location; and a beam delivery system configured to receive the amplified light beam emitted from the drive laser system and to direct the amplified light beam toward the target location. The beam delivery system includes: a beam expansion system for expanding size of the amplified light beam; and a focusing element configured and arranged to focus the amplified light beam at the target location.