SUBSTRATE PROCESSING METHOD

摘要

A hydrophobizing agent vapor is supplied to a substrate and a surface of the substrate including a pattern is hydrophobized. Thereafter, the substrate is dried by vaporizing the hydrophobizing agent. The substrate to be processed is maintained in a state of not contacting water until it is dried after being hydrophobized. Collapse of a pattern formed on the substrate surface is thereby suppressed or prevented.

主权项

1. A substrate processing method comprising:
a hydrophobizing step of hydrophobizing a surface of a substrate by supplying a vapor of a hydrophobizing agent to the substrate including a pattern formed on the surface of the substrate; a drying step of drying the substrate by vaporizing the hydrophobizing agent adhering to the substrate, after performing the hydrophobizing step; and a step of maintaining the substrate in a state of not contacting water from an end of the hydrophobizing step to an end of the drying step.