SOUNDPROOFING COVER FOR CHARGED PARTICLE BEAM DEVICE, AND CHARGED PARTICLE BEAM DEVICE

摘要

Provided is a charged particle beam device allowing for both a suppression of image disturbance at a specific frequency, and a reduction in size. The charged particle beam device comprises a sample conveyor device (12) and a soundproofing cover (13) which is disposed such that there is a gap (21) between the sample conveyor device (12) and the soundproofing cover (13), said soundproofing cover (13) enclosing a charged particle beam column and a sample chamber. An opening (30) is provided on a wall surface of the cover (13), whereof the surface orientation is a first direction that is the direction in which the cover (13) and the sample conveyor device (12) are arranged. The opening (30) is provided at a position within 1/8 of the wall surface length in the first direction from a center position on the cover (13) in the first direction.