发明名称 PROBE CARD INSPECTION APPARATUS
摘要 A probe card testing apparatus according to an embodiment of the present invention comprises: a substrate; a first insulating layer which covers the substrate; and a first detecting part which is formed on the first insulating layer and detects physical defects of a probe needle, wherein the first detecting part comprises: a ground detecting part which has a first conducting pattern defining a number of opening parts which detect defects of a ground probe and expose a part of the first insulating layer; and a signal and power supply detecting part which has a second conducting pattern defining a number of opening parts which detect defects of a signal probe and a power supply probe and expose a part of the first insulating layer.
申请公布号 KR20150070857(A) 申请公布日期 2015.06.25
申请号 KR20130157528 申请日期 2013.12.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KANG, SHIN HO;KIM, JUNG WOO;JI, JOON SU
分类号 G01R35/00;G01R1/073 主分类号 G01R35/00
代理机构 代理人
主权项
地址