ELECTRON MICROSCOPE AND ELECTRON MICROSCOPE SAMPLE RETAINING DEVICE

摘要

An object of the invention is to provide an electron microscope which can easily and safely prepare a gas or liquid environment in the electron microscope and can observe a specimen in the environment and a reaction of the specimen at a high resolution and to provide a specimen holder for the electron microscope. In the electron microscope including specimen holding means (6) for holding a specimen (23), the specimen (23) is placed in a capillary (17) through which electron beams are transmittable, the electron microscope includes a supply device for supplying gas or liquid into the capillary (17) and a collection device for collecting the gas or the liquid, and the electron microscope obtains a specimen image of the specimen while flowing the gas or the liquid.

主权项

1. An electron microscope, comprising:
an electron source for discharging primary electron beams; electron beam control means for condensing the primary electron beams discharged from the electron source and irradiating a specimen with the primary electron beams; a detector for detecting an electron generated from the specimen; a calculation device for preparing a specimen image on the basis of a signal from the detector; display means for displaying the specimen image; and means for recording the displayed specimen image, wherein: the specimen is placed in a capillary through which the primary electron beams are transmittable; the electron microscope includes
a supply device for supplying gas or liquid into the capillary anda collection device for collecting the gas or the liquid; and the electron microscope obtains the specimen image of the specimen while flowing the gas or the liquid.