| 发明名称 |
ELECTRON BEAM DRAWING APPARATUS, ELECTRON BEAM DRAWING METHOD, AND STORAGE MEDIUM |
| 摘要 |
An electron beam drawing apparatus includes: an accepting unit that accepts input graphic information, which is information representing at least one graphic; a graphic width acquiring unit that acquires a width of each of the at least one graphic represented by the input graphic information; a generating unit that generates approximate graphic information representing at least one approximate graphic, which is a graphic configured by at least one rectangle matching the width of the graphic, and is a graphic that approximates each of the at least one graphic represented by the input graphic information; and a drawing unit that draws the at least one approximate graphic represented by the approximate graphic information generated by the generating unit. |
| 申请公布号 |
US2015178439(A1) |
申请公布日期 |
2015.06.25 |
| 申请号 |
US201314406641 |
申请日期 |
2013.12.06 |
| 申请人 |
NIPPON CONTROL SYSTEM CORPORATION |
发明人 |
Tao Takuya;Hamaji Masakazu |
| 分类号 |
G06F17/50;H01J37/317;G03F1/78 |
主分类号 |
G06F17/50 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An electron beam drawing apparatus, comprising:
an accepting unit that accepts input graphic information, which is information representing at least one graphic; a graphic width acquiring unit that acquires a width of each of the at least one graphic represented by the input graphic information; a generating unit that generates approximate graphic information representing at least one approximate graphic, which is a graphic configured by at least one rectangle matching the width of the graphic, and is a graphic that approximates each of the at least one graphic represented by the input graphic information; and a drawing unit that draws the at least one approximate graphic represented by the approximate graphic information generated by the generating unit. |
| 地址 |
Tokyo JP |
