| 主权项 |
1. A trihalosilane refining device comprising:
a divided wall distillation column having an upper column region, a preliminary separation region, a main separation region and a lower column region formed therein and comprising an inlet port installed to introduce a feed containing a trihalosilane into the preliminary separation region, a first outlet port, a second outlet port and a third outlet port; and a first distillation column coupled to the divided wall distillation column, wherein the inlet port is installed at a 1/10 to 5/10 section of the preliminary separation region and wherein the second outlet port is formed at a 6/9 to 8/9 section of a divided wall section of the main separation region. |
