发明名称 METHOD OF MANUFACTURING COMPONENT BUILT-IN SUBSTRATE, AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress warpage of a substrate, to suppress position displacement of components, and to achieve an excellent arrangement accuracy of components.SOLUTION: A method includes the following steps of: (A) vacuum-laminating a first adhesive film 10 including a first supporting body 11 and a first thermoset resin composition layer 12 bonded with the first supporting body 11, on an insulation substrate 1' provided with a cavity 1a penetrating between first and second principal surfaces; (B) temporarily bonding components on the first thermoset resin composition layer 12 in the cavity 1a; (C) vacuum-laminating a second adhesive film including a second supporting body and a second thermoset resin composition layer bonded with the second supporting body, on a second principal surface of the insulation substrate 1' at a condition that a heating temperature of the surface of the first adhesive film 10 is lower than that of the surface of the second adhesive film surface; and (D) thermally curing the first and second thermoset resin composition layers to form an insulating layer.
申请公布号 JP2015118954(A) 申请公布日期 2015.06.25
申请号 JP20130259370 申请日期 2013.12.16
申请人 AJINOMOTO CO INC 发明人 NAKAMURA SHIGEO;MAKO GENJIN
分类号 H05K3/46 主分类号 H05K3/46
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