| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier system which can secure a storage space of an object to be carried and improve carrying efficiency of the object to be carried. ! SOLUTION: A carrier system includes: a stacker crane 30 which carries an object 10 to be carried in and out load ports 54, 56 of semiconductor manufacturing devices 50, 52; a vehicle 40 which travels along a rail R2 provided above the load ports 54, 56, rises a gripper with which the object 10 to be carried is gripped, and carries the object 10 to be carried; and a storage shelf 20 which is provided near the semiconductor manufacturing devices 50, 52, houses the object 10 to be carried, and can take in and out the object 10 to be carried by the stacker crane 30. The object 10 to be carried can be carried in and out the load ports 54, 56 by the stacker crane 30 and the vehicle 40. ! COPYRIGHT: (C)2015,JPO&INPIT |
