| 发明名称 |
VIBRATING DEVICE AND MANUFACTURING METHOD THERFOR |
| 摘要 |
A vibrating device having vibrating arms connected to a supporter. The vibrating arms have an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer. The exciter has a piezoelectric thin film and a first and second electrodes with the piezoelectric thin film interposed therebetween. |
| 申请公布号 |
US2015180449(A1) |
申请公布日期 |
2015.06.25 |
| 申请号 |
US201514643286 |
申请日期 |
2015.03.10 |
| 申请人 |
Murata Manufacturing Co., Ltd. |
发明人 |
Umeda Keiichi;Kishi Takehiko;Nishimura Toshio;Hase Takashi |
| 分类号 |
H03H9/21;H01L41/29;H01L41/31 |
主分类号 |
H03H9/21 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A vibrating device, comprising:
a supporter; and a vibrating arm connected to the supporter, wherein the vibrating arm has an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer, and the exciter has a piezoelectric film, and first and second electrodes provided with the piezoelectric film interposed therebetween, the exciter causing bending vibration of the vibrating arm. |
| 地址 |
Nagaokakyo-shi JP |
