METHOD OF MANUFACTURING NONVOLATILE SEMICONDUCTOR STORAGE DEVICE AND NONVOLATILE SEMICONDUCTOR STORAGE DEVICE

摘要

A method of nonvolatile semiconductor storage device including forming a tunnel insulating film so as to contact a semiconductor substrate; forming a charge trap layer above the tunnel insulating film including a trap layer configured to trap charge and a block layer configured to block penetration of electrons; forming a control electrode so as to contact the charge trap layer; anisotropically etching the control electrode to expose a sidewall of the control electrode; depositing a deposit so as to be attached to a surface of the sidewall of the control electrode exposed by the etching; and anisotropically etching the charge trap layer using the deposit as a mask so that the charge trap layer projects in a gate-length direction from a lower end of the sidewall of the control electrode and a sidewall of the charge trap layer is exposed.

主权项

1. A method of nonvolatile semiconductor storage device comprising:
forming a tunnel insulating film so as to contact a semiconductor substrate; forming a charge trap layer above the tunnel insulating film including a trap layer configured to trap charge and a block layer configured to block penetration of electrons; forming a control electrode so as to contact the charge trap layer; anisotropically etching the control electrode to expose a sidewall of the control electrode; depositing a deposit so as to be attached to a surface of the sidewall of the control electrode exposed by the etching; and anisotropically etching the charge trap layer using the deposit as a mask so that the charge trap layer projects in a gate-length direction from a lower end of the sidewall of the control electrode and a sidewall of the charge trap layer is exposed.