发明名称 METHOD AND DEVICE FOR THE EXAMINATION OF A SAMPLE USING OPTICAL PROJECTION TOMOGRAPHY
摘要 The invention relates to a method for the examination by tomography of a sample (9). According to said method, a sample (9) is illuminated with an illumination light beam (3), and a transmission light beam (10), which contains the light of the illumination light beam (3) transmitted through the sample (9), is detected by means of a transmission detector (13). The invention further relates to a device for the examination of a sample (9) by tomography. The illumination light beam (3) and the transmission light beam (10) pass through the same lens (7) with opposite propagation directions.
申请公布号 WO2015091713(A1) 申请公布日期 2015.06.25
申请号 WO2014EP78335 申请日期 2014.12.17
申请人 LEICA MICROSYSTEMS CMS GMBH 发明人 KNEBEL, WERNER;FOUQUET, WERNHER;SIECKMANN, FRANK
分类号 G01N21/47;G01N21/64;G02B21/00 主分类号 G01N21/47
代理机构 代理人
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