发明名称 TEMPLATE FOR GROWING SEMICONDUCTOR, METHOD OF SEPARATING GROWTH SUBSTRATE AND METHOD OF FABRICATING LIGHT EMITTING DEVICE USING THE SAME
摘要 A template for growing a semiconductor, a method of separating a growth substrate and a method of fabricating a light emitting device using the same are disclosed. The template for growing a semiconductor includes a growth substrate including a nitride substrate; a seed layer disposed on the growth substrate and including at least one trench; and a growth stop layer disposed on a bottom surface of the trench, wherein the trench includes an upper trench and a lower trench, and the upper trench has a smaller width than the lower trench.
申请公布号 US2015179875(A1) 申请公布日期 2015.06.25
申请号 US201414578199 申请日期 2014.12.19
申请人 Seoul Viosys Co., Ltd. 发明人 Jang Jong Min;Lee Hee Sub;Roh Won Young;Chae Jong Hyeon;Lee Joon Sup;Suh Daewoong;Kim Hyun A.;Bae Seon Min
分类号 H01L33/00;C30B25/18 主分类号 H01L33/00
代理机构 代理人
主权项 1. A template for growing a semiconductor comprising: a growth substrate including a nitride substrate; a seed layer disposed over the growth substrate and including at least one trench; and a growth stop layer disposed over a bottom surface of the trench, wherein the trench includes an upper trench and a lower trench, and the upper trench has a smaller width than the lower trench.
地址 Ansan-si KR