| 摘要 |
A substrate alignment device (1) is provided with: a plurality of rotating platforms (4) which hold a plurality of substrates horizontally and vertically, and which rotate around an axis; a rotation drive device (2) which synchronizes and rotates the plurality of rotating platforms (4); sensors (13) which detect a notch (90) of each of the substrates held by the plurality of rotating platforms (4); a plurality of supporting claws (50) which support peripheries of the substrates which are upon the rotating platforms (4); supporting claw drive structures (70) which individually move the plurality of supporting claws (50) horizontally between an inward position and an outward position; and raising and lowering devices (30) which raise and lower together the plurality of supporting claw drive structures between a high position and a low position. The substrate alignment device (1), on the basis of positions of each of the notches (90) detected by the sensors (13), causes the rotation drive device (2), the supporting claw drive structures (70), and the raising and lowering devices (30) to perform a predetermined operation including substrate lifting, which lifts only substrates for which alignment has been completed from the rotating platforms, and thereby, positions the notches (90) of the plurality of substrates at a reference rotation angle position. |
