CYLINDRICAL BASE, MASTER PLATE AND METHOD FOR PRODUCING MASTER PLATE

摘要

Provided are: a cylindrical base which is capable of uniformly transferring a fine pattern; a master plate; and a method for producing a master plate. A cylindrical base (11) which is formed of a cylindrical quartz glass material and has an internal strain of less than 70 nm/cm in terms of birefringence amount is used. A resist layer is formed on the outer circumferential surface of this cylindrical base (11), and a latent image is formed in the resist layer. The resist layer provided with the latent image is developed, and etching is carried out using the developed pattern of the resist layer as a mask. Consequently, there is formed a structure (12) that is configured of a plurality of recessed portions or projected portions, which are arranged on the outer circumferential surface of the cylindrical base (11).