| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer housing cassette which can be folded when a wafer is not housed therein. ! SOLUTION: A wafer housing cassette comprises: a first lateral plate 2 provided therein with a plurality of support grooves 21 for supporting a wafer; a second lateral plate 3 arranged parallel to the first lateral plate with a predetermined distance; a base plate 4 for coupling the lower end of the first lateral plate to the lower end of the second lateral plate; a top plate 5 for coupling the upper end of the first lateral plate to the upper end of the second lateral plate; a back plate 6 arranged between the rear end of the top plate and the rear end of the base plate; and a take-in/take-out opening provided on the front end side of the first lateral plate, the second lateral plate, the base plate and the top plate. The lower end portion of the first lateral plate is rotatably coupled to one lateral portion of the base plate, while the lower end portion of the second lateral plate is coupl |
