| 摘要 |
PROBLEM TO BE SOLVED: To receive and deliver an object to be inspected between transport tables stably and enhance versatility. ! SOLUTION: The inspection equipment comprises: first and second transport tables supported so as to freely rotate around a horizontal axis; and a third transport table supported so as to freely rotate around a vertical axis. The first and second transport tables respectively have a holding part on the other part side for holding one end part side of an object to be inspected, and the third transport table has a holding part for the other end part side for holding the other end part side of the object to be inspected, and receives the object to be inspected from the first transport table and then delivers the object to be inspected to the second transport table. ! COPYRIGHT: (C)2015,JPO&INPIT |
