MICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING AN OPTIMIZED NON-FLAT SURFACE

摘要

A capacitive micromachined ultrasound transducer (cMUT) and fabrication method of the same are provided. The cMUT has a substrate, a curved membrane disposed on top of the substrate, and a flexible membrane disposed on top of the curved membrane. The curved membrane has a raised portion which is higher than a recessed portion relative to the substrate, and is supported by a support standing on a major surface of the substrate. The flexible membrane includes a first region mounted to the raised portion of the curved membrane, and a second region extending over the recessed portion of the curved member. Methods for fabricating the cMUT are also disclosed.

主权项

1. A capacitive micromachined ultrasound transducer (cMUT), comprising:
a substrate; a curved membrane disposed on top of the substrate, the curved membrane having a raised portion higher than a recessed portion relative to the substrate, the raised portion being supported by a support standing on a major surface of the substrate, wherein at least one of the curved membrane and the substrate has a first electrode; and a flexible membrane disposed on top of the curved membrane, either directly or indirectly supported by the curved membrane, wherein the flexible membrane has a second electrode opposing the first electrode to define a gap width therebetween.