DIRECTIONAL MEMS MICROPHONE AND RECEIVER DEVICE

摘要

The present invention provides a directional MEMS microphone and a receiver device wherein MEMS microphone comprises a microphone cover, a printed circuit board (PCB), a application specific integrated circuit (ASIC) chip, a MEMS die, a diaphragm, a damping, a metal wire(s), at least two internal acoustic ports and at least two external acoustic ports corresponding to the internal acoustic ports. The microphone further comprises a tuning cavity which includes a first tuning cavity by which a first internal acoustic port is communicated with a first external acoustic port, or by which a second internal acoustic port is communicated with a second external acoustic port. Compared with the prior art, the directional MEMS microphone including the tuning cavity to form a sound transmission channel by connecting the internal acoustic port and the external acoustic port expands the sound transmission distance, thereby increasing the sensitivity the directivity of the MEMS microphone.

主权项

1. A directional microelectromechanical system (MEMS) microphone, comprising:
a microphone cover; a printed circuit board (PCB) which is coupled to the microphone cover to form a housing; a application specific integrated circuit (ASIC) chip which is attached to the PCB within the housing; a MEMS die which is attached to the PCB within the housing; a diaphragm which is attached to the MEMS die; a metal wire(s) by which the ASIC chip, the MEMS die and the PCB are electrically interconnected; at least two internal acoustic ports including a first internal acoustic port which is disposed on the PCB within the housing and is corresponded to the position of the diaphragm and a second internal acoustic port which is disposed on the PCB within the housing and/or on the microphone cover; at least two external acoustic ports corresponding to the internal acoustic ports and including a first external acoustic port disposed on the exterior of the housing and a second external acoustic port disposed on the exterior of the housing; and a damping which is secured to cover one of the internal acoustic ports or one of the external acoustic ports corresponding to the internal acoustic ports; and the microphone further comprising: a tuning cavity including a first tuning cavity by which the first internal acoustic port is communicated with the first external acoustic port, or by which the second internal acoustic port is communicated with the second external acoustic port.