| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle backflow prevention member capable of preventing a particle from making an entry into a treatment container, while maintaining exhaust efficiency.SOLUTION: A particle backflow prevention member, which is arranged within an exhaust pipe communicating a treatment container with an exhaust system, includes a first plate-like member, and a second plate-like member that has an opening and that is arranged on the side of the exhaust system with a first clearance with respect to the first plate-like member. The opening is covered with the first plate-like member in a plan view. |
