| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect classification method which allows for classification of basal plane dislocation, that is the killer defect, while distinguishing from other defects in a bipolar high voltage element, and to provide an inspection apparatus. ! SOLUTION: A defect classification method includes a step for forming a reflection image and a photoluminescence image by projecting an illumination beam toward a silicon carbide substrate 16, a first inspection step for detecting a defect image from a reflection image thus formed, a second inspection step for detecting a defect image from a photoluminescence image thus formed, and a defect classification step for classifying the detected thus detected, based on the presence or absence of a defect image and the shape of a defect image thus detected. ! COPYRIGHT: (C)2015,JPO&INPIT |
