发明名称 APPARATUS AND METHODS TO FORM A PATTERNED COATING ON AN OLED SUBSTRATE
摘要 An apparatus for applying a patterned coating to an OLED substrate in a continuous roll-to-roll vapor based deposition process is provided comprising a vapor deposition source, a processing drum, a drive roller, and a shadow mask wherein the shadow mask comprises a mask line feature that selectively prevents deposition of the coating onto the substrate. Also presented is a method for applying the coating.
申请公布号 US2015179986(A1) 申请公布日期 2015.06.25
申请号 US201514614020 申请日期 2015.02.04
申请人 General Electric Company 发明人 Yan Min;Turner Larry;Erlat Ahmet Gun;Smith David J.;Monaghan William Francis
分类号 H01L51/56;H01L51/00 主分类号 H01L51/56
代理机构 代理人
主权项 1. A method of applying a patterned coating to an OLED substrate in a roll-to-roll vapor based deposition process comprising: providing an OLED substrate; providing a drive roller to allow continuous movement of the OLED substrate from a feed roll to a take-up roll; providing a processing drum and a shadow mask, positioned between the feed roll and the take-up roll, wherein the shadow mask is in close proximity to and matches the curvature of the processing drum and wherein the shadow mask comprises; one or more mask line features parallel to the moving direction of the OLED substrate wherein said mask line feature selectively prevents deposition of the coating on to one or more areas of the OLED substrate; and one or more beam features perpendicular to the moving direction of the OLED substrate wherein said beam feature provides mechanical support to the mask line features; positioning the OLED substrate on the feed roll and take up roll such that the OLED substrate is wrapped around the processing drum and is in close approximation to the shadow mask; transporting the OLED substrate from the feed roll to the take-up roll using the drive roller; and depositing a coating on to the OLED substrate, through the shadow mask, from a vapor deposition source.
地址 Schenectady NY US