INFRARED THERMAL SENSOR WITH GOOD SNR

摘要

An infrared thermal sensor for detecting infrared radiation, comprising a substrate and a cap structure together forming a sealed cavity, the cavity comprising a gas at a predefined pressure; a membrane arranged in said cavity for receiving infrared radiation; a plurality of beams for suspending the membrane; a plurality of thermocouples for measuring a temperature difference between the membrane and the substrate; wherein the ratio of the thermal resistance between the membrane and the substrate through the thermocouples, and the thermal resistance between the membrane and the substrate through the beams and through the gas is a value in the range of 0.8 to 1.2. A method of designing such a sensor, and a method of producing such a sensor is also disclosed.

主权项

1. An infrared thermal sensor for detecting infrared radiation, the infrared thermal sensor comprising:
a substrate and a cap structure together forming a sealed cavity, the cavity comprising a gas composition at a predefined pressure; a membrane arranged in said cavity for receiving infrared radiation through a window or aperture; a plurality of beams for suspending the membrane; a plurality of thermocouples arranged on said plurality of beams for measuring a temperature difference between the membrane and the substrate due to incident infrared radiation; wherein the ratio of the thermal resistance between the membrane and the substrate through the thermocouples, and the thermal resistance between the membrane and the substrate through the beams and through the gas composition is a value in the range of 0.8 to 1.2.