| 发明名称 |
MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE |
| 摘要 |
Structures and formation methods of a micro-electro mechanical system (MEMS) device are provided. The MEMS device includes a substrate and a MEMS structure over the substrate, and the MEMS structure has a movable element. The movable element is surrounded by a cavity. The MEMS device also includes a fuse layer on the movable element. |
| 申请公布号 |
US2015175405(A1) |
申请公布日期 |
2015.06.25 |
| 申请号 |
US201514638228 |
申请日期 |
2015.03.04 |
| 申请人 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
发明人 |
CHENG Chun-Ren |
| 分类号 |
B81B3/00;B81C3/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro-electro mechanical system (MEMS) device, comprising:
a substrate; a MEMS structure over the substrate, wherein the MEMS structure has a movable element, the movable element is surrounded by a cavity; and a fuse layer on the movable element. |
| 地址 |
Hsin-Chu TW |
