发明名称 PHOTOSENSITIVE TRANSFER MATERIAL, PATTERN FORMATION METHOD, AND ETCHING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive transfer material that is positive, has superior heat-resistant rectangularity, has superior etchant resistance, has superior resist peeling properties, and has a low occurrence of dust generation when processed.SOLUTION: Provided is a photosensitive transfer material having a support body and a photosensitive resin composition layer, where the photosensitive resin composition layer contains (A) a polymer component containing a polymer having a constituent unit (a1) having a group in which an acid group is protected by an acid-labile group and (B) a photoacid generator, and the photosensitive resin composition layer does not have an ethylene cross-linked structure.
申请公布号 JP2015118202(A) 申请公布日期 2015.06.25
申请号 JP20130260818 申请日期 2013.12.18
申请人 FUJIFILM CORP 发明人 SATO MORIMASA
分类号 G03F7/004;C08F12/22;C08F20/26;C08G8/10;C08G8/36;G03F7/039;H01L21/027 主分类号 G03F7/004
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