| 摘要 |
PROBLEM TO BE SOLVED: To provide a light irradiation device capable of maintaining the atmosphere required in a processing chamber, thereby efficiently processing a processing object in a short period of time. ! SOLUTION: A light irradiation device has two spaces partitioned by a sealing member arranged on a light-transmissive window member and a peripheral portion of the light-transmissive window member. A lamp chamber is formed by one of the spaces, and a processing chamber is formed by the other space. The processing chamber is provided with processing gas supply means for supplying processing gas containing an active species source which generates an active species from ultraviolet light emitted from an ultraviolet radiation lamp. The lamp chamber is provided with lamp chamber atmospheric gas supply means for supplying lamp chamber atmospheric gas. When the light irradiation device is in operation, the internal pressure in the processing chamber is kept higher than that in the lamp chamber. ! COPYRIGHT |
