| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron emission element that is prevented from being broken owing to thermal expansion and can be driven for a long time. ! SOLUTION: An electron emission element 1 includes: a first electrode 2; an insulation layer 3 which is formed on the first electrode 2 and provided with an opening part 3a; an intermediate layer 4 which is formed on the insulation layer 3 and in contact with the first electrode 2 through the opening part 3a; and a second electrode 5 which is formed on the intermediate layer 4. The second electrode 5 is partially arranged in a region on the insulation part 3, and the insulation layer 3 has a peripheral edge part of the opening part 3a formed into an inclined part 3b inclined to the side of the first electrode 2 toward an opening end. The electron emission element 1 emits electrons from the second electrode 5 as a voltage is applied between the first electrode 2 and second electrode 5. ! COPYRIGHT: (C)2015,JPO&INPIT |
