| 摘要 |
PROBLEM TO BE SOLVED: To provide a phase contrast observation device that allows quantitative observation of an object with a simple configuration. ! SOLUTION: The phase contrast observation device includes: an illumination optical system that guides light from a light source to an irradiation target surface; an imaging optical system that forms an optical image of the irradiation target surface; a first aperture diaphragm provided inside the illumination optical system; and a second aperture diaphragm provided inside the imaging optical system. The second aperture diaphragm allows direct light passing through the first aperture diaphragm to pass while blocks a part of diffracted light from the irradiation target surface. ! COPYRIGHT: (C)2015,JPO&INPIT |
