发明名称 VERTICAL CAVITY SURFACE EMITTING LASER AND ATOMIC OSCILLATOR
摘要 A vertical cavity surface emitting laser includes: a substrate; a first mirror layer which is provided over the substrate; an active layer which is provided over the first mirror layer; a second mirror layer which is provided over the active layer; a first electrode and a second electrode which are electrically connected to the first mirror layer and are separated from each other; and a third electrode which is electrically connected to the second mirror layer, wherein the first mirror layer, the active layer, and the second mirror layer configure a laminated body, the laminated body includes a resonance portion which resonates light generated in the active layer, in a plan view, an insulation layer surrounding the laminated body is provided, and in the plan view, the insulation layer is provided between the first electrode and the second electrode.
申请公布号 US2015180209(A1) 申请公布日期 2015.06.25
申请号 US201414573622 申请日期 2014.12.17
申请人 Seiko Epson Corporation 发明人 TAKENAKA Satoshi;KURACHI Yuji
分类号 H01S5/183 主分类号 H01S5/183
代理机构 代理人
主权项 1. A vertical cavity surface emitting laser comprising: a substrate; a first mirror layer which is provided over the substrate; an active layer which is provided over the first mirror layer; a second mirror layer which is provided over the active layer; a first electrode and a second electrode which are electrically connected to the first mirror layer and are separated from each other; and a third electrode which is electrically connected to the second mirror layer, wherein the first mirror layer, the active layer, and the second mirror layer configure a laminated body, the laminated body includes a resonance portion which resonates light generated in the active layer, in a plan view, an insulation layer surrounding the laminated body is provided, and in the plan view, the insulation layer is provided between the first electrode and the second electrode.
地址 Tokyo JP