发明名称 THREE-DIMENSIONAL INTEGRATED CIRCUIT STRUCTURES PROVIDING THERMOELECTRIC COOLING AND METHODS FOR COOLING SUCH INTEGRATED CIRCUIT STRUCTURES
摘要 Three-dimensional integrated circuit structures providing thermoelectric cooling and methods for cooling such integrated circuit structures are disclosed. In one exemplary embodiment, a three-dimensional integrated circuit structure includes a plurality of integrated circuit chips stacked one on top of another to form a three-dimensional chip stack, a thermoelectric cooling daisy chain comprising a plurality of vias electrically connected in series with one another formed surrounding the three-dimensional chip stack, a thermoelectric cooling plate electrically connected in series with the thermoelectric cooling daisy chain, and a heat sink physically connected with the thermoelectric cooling plate.
申请公布号 US2015179543(A1) 申请公布日期 2015.06.25
申请号 US201314138593 申请日期 2013.12.23
申请人 GLOBALFOUNDRIES Singapore Pte. Ltd. 发明人 Tan Juan Boon;Liu Wei;Tee Kheng Chok;Chew Kam Chew
分类号 H01L23/38;H01L23/367;H01L25/065;H01L23/48 主分类号 H01L23/38
代理机构 代理人
主权项 1. A three-dimensional integrated circuit structure comprising: a plurality of integrated circuit chips stacked one on top of another to form a three-dimensional chip stack; a thermoelectric cooling daisy chain comprising a plurality of vias electrically connected in series with one another formed surrounding the three-dimensional chip stack; a thermoelectric cooling plate electrically connected in series with the thermoelectric cooling daisy chain; and a heat sink physically connected with the thermoelectric cooling plate.
地址 Singapore SG