Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same

摘要

Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.

主权项

1. A sensor comprising:
(a) a substrate having a cavity; (b) a thin electrically conductive membrane bounding at least part of the cavity; (c) a first source trace electrically connected to the thin electrically conductive membrane; (d) a first sensor trace operatively connected to the substrate; and (e) a first gate trace operatively connected to the substrate.