METHOD OF MANUFACTURING DISPLAY APPARATUS

摘要

A gate electrode is formed on a substrate. An active layer is formed on the gate electrode. A metal layer is formed on the active layer. An amorphous carbon layer is formed on the metal layer. A mask pattern is formed on the amorphous carbon layer. An amorphous carbon pattern is formed by patterning the amorphous carbon layer by using a mask pattern. The metal layer and the active layer are patterned by using the mask pattern and the amorphous carbon pattern so a metal pattern and an active pattern are formed. A source electrode and a drain electrode are formed by etching the metal pattern corresponding to the position of a channel region of the active pattern. The amorphous carbon pattern is removed. A display substrate is formed by forming a pixel which is electrically connected to a thin film transistor where the gate electrode, the active pattern, the source electrode, and the drain electrode are defined. An opposite substrate combined to the display substrate is formed.