| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater capable of uniformly controlling the temperature distribution.SOLUTION: A heater 10 of this invention includes a rod like ceramic body 1 having a center axis C, and a heating resistor 2 buried in the ceramic body 1 along the center axis C, and the heating resistor 2 is constituted by a first spiral part 2a and a second spiral part 2b respectively extended along the center axis C of the ceramic body 1 and connected with each other on an end side of the ceramic body 1, and an axis of the first spiral part 2a and an axis of the second spiral part 2b are overlapped with each other, and the first spiral part 2a and the second spiral part 2b are line symmetrical to the overlapped axes. A temperature difference between a high temperature part and a low temperature part by the heating resistor 2 can be decreased, and thereby, the temperature distribution of the heater 10 can be uniformly controlled. |
